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Synopsys Sentaurus TCAD
connect to the virtual machine
ssh -X user@cloud-gw-223.to.infn.it
The first time you start Sentaurus, you have to set the STDB environment variable.
1. create a folder called DB inside your space on /data disk
sudo mkdir /data/users/<your_name>/DB
2. edit your .cshrc file by typing
sentenv STDB = /data/users/<your_name>/DB
lauch Sentaurus Workbench by typing
swb
or Structure Editor
sde
!!!selinux disabled to let xauth work properly (configuration file edited)
Example: gaussian doping profile definition
1. create a window for your doping concentration, here I used the “Line” option (other possibilities are rectangle, polygon..)
syntax “window name” “window type” (window start coordinate) (window end coordinate)
(sdedr:define-refeval-window "Ndeep_wind1" "Line" (position xndeep0 @L@ 0.0) (position xndeep1 @L@ 0.0) )
2. define the doping profile placement and the direction
(sdedr:define-analytical-profile-placement "AnalyticalProfilePlacement_Ndeep1" "AnalyticalProfileDefinition_Ndeep1" "Ndeep_wind1" "Negative" "NoReplace" "Eval")
3. set the type of dopant, peak position and value, value at junction (the doping concentration of the bulk) and junction depth (where your doping joins the bulk). NOTE!!!: peak position is relative to your profile, it is NOT the coordinate of peak in the whole device.
(sdedr:define-gaussian-profile "AnalyticalProfileDefinition_Ndeep1" "ArsenicActiveConcentration" "PeakPos" 1 "PeakVal" 5e+17 "ValueAtDepth" 2.5e+12 "Depth" 2 "Gauss" "Factor" 0.8)